Semiconductors
Special gas industry solutionsIn the semiconductor manufacturing process, the purity and stability of special gases directly affect chip performance and product yield.Any small leakage in the gas delivery system will not only cause waste of expensive gas, but may also lead to process pollution, equipment damage and even safety accidents.Based on the special properties of semiconductor special gases, Hairis provides professional sealing testing solutions to ensure that the gas delivery system maintains a perfect sealing state with zero leakage throughout the entire process.
We provide comprehensive testing for key aspects of special gas systems:
Gas cylinder cabinet and valve box seal inspection
Ultra-high-sensitivity helium mass spectrometry leak detection technology is used to accurately detect key parts such as cylinder joints and valve sealing surfaces to ensure absolute sealing at the source.
Gas distribution line seal verification
Conduct full-link inspection of stainless steel EP pipes, VCR joints and other transportation pipelines to ensure that there is no risk of leakage during gas transportation.
Process Equipment Interface Seal Assessment
Conduct sealing verification for gas access points of etching, CVD and other equipment to prevent process parameter drift caused by interface leakage.
Gas control component seal inspection
Professionally evaluate the sealing performance of precision components such as mass flow meters (MFC) and pressure controllers to ensure that control accuracy is not affected by leakage.
Detection accuracy reaches 10?12 mb·L/s, meeting semiconductor-level requirements
Loss caused by gas leakage is reduced by more than 90%
Process abnormalities caused by gas pollution are reduced by 95%
Detection efficiency is increased by 5 times, supporting rapid verification of production lines
