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HM-100 residual gas analyzer (RGA)
- high resolution
- <1amu
- Strong detection ability
- Minimum detectable partial pressure 3*10-14Torr
- Wide mass range
- 1-100amu, can identify H2, He, H2O, N2, O2, CO2 and other key gases
Product Overview
HM-100 is a "sensor" that can be used for gas component analysis and requires a sampling system and analysis software.
As the core of gas composition analysis"Sensor", which can conduct qualitative and quantitative analysis of the residual gas components inside the sealed cavity.Like a precise diagnostic expert, it accurately identifies and quantifies various gas components such as H?O, O?, N?, and CO? remaining in the cavity by measuring the intensity of ions with different mass-to-charge ratios.
Specifications
| product specifications | name | Residual Gas Analyzer (RGA) | Performance parameters | Sensor length | 315 mm |
| overall length | 486 mm | ||||
| Specifications and models | HM-100 | Mass range | 1-100 amu | ||
| Resolution (@10% peak height) | <1 amu | ||||
| Dimensions (mm) | L486*W119*H119 | Filament type | Ytttrium oxide coated iridium filament dual filament / dual tungsten filament | ||
| Detector type | FC/CEM | ||||
| Voltage and power consumption | DC24V，5A | Sensitivity(FC) | 3*10-4A/Torr | ||
| Sensitivity(EM) | 0.1 A/Torr | ||||
| weight | 3kg | Minimum detectable partial pressure (EM) | 3*10-14Torr | ||
| Maximum sensor operating temperature (FC/EM) | 200 ℃ /120 ℃ | ||||
| highest working pressure | 5*10-4Torr | Maximum baking temperature | 300℃ | ||
| Maximum scan rate | 20 ms/point | ||||
| Maximum working pressure | 5 *10-4Torr |
Application Scenarios
Application Examples
