In the fields of precision manufacturing and high-end equipment, sealing performance is the key to ensuring product reliability and safety.Taking semiconductor vacuum equipment as an example, any fluctuations in vacuum degree and impurity contamination will directly affect process stability and lead to a decrease in process yield.Large-scale equipment such as aerospace, electric power, and liquid cooling have complex structures. Any small leakage will not only increase system operating costs, but may also cause safety hazards and damage brand reputation.

Helium mass spectrometer leak detectors and residual gas analyzers (RGA) based on mass spectrometry technology have become core solutions for precision leak detection and process monitoring due to their high sensitivity, high precision and versatility.

This article will combine Heris' helium mass spectrometer series and quadrupole mass spectrometer series products to systematically analyze the principles, differences and applications of the two technologies to provide a reference for industrial testing.

1Technical core: homologous mass spectrometry, different missions

gas ionization → Separation according to mass-to-charge ratio (m/z) → Ion detection → Signal analysis 

However, the design goals of the two are different, so they have different application values.

Principles of helium mass spectrometry

The ion source ionizes the substances in the gas into positive ions, which enter the magnetic deflection mass analyzer driven by the accelerating voltage of the ion source.Under a fixed magnetic field strength, gas ions of different masses have different deflection radii. Helium ions of suitable mass can be detected by being driven into the Faraday cup through the gap between the baffles in the middle of the magnetic field. Other lighter or heavier ions cannot be detected through the gap.

Quadrupole mass spectrometry principle

The ion source ionizes the substances in the gas into positive ions, which enter the quadrupole mass analyzer driven by the accelerating voltage of the ion source. 

Two pairs of rods in the quadrupole apply different AC and DC voltages respectively to form a quadrupole field. By controlling the voltage, only ions with one mass number are allowed to pass through the quadrupole at a certain time, and finally enter the detector for detection. 

The detected signal intensity corresponds to the amount of this ion, and then the amount of material containing this ion can be deduced.

2 One table to understand helium mass spectrum andRGATechnical differences

3 Practical application: empowering accurate detection in multiple industries

Hirays helium mass spectrometer series and RGA series are representative solutions for micro-leak detection and gas analysis. They can realize a full closed-loop process from diagnosis, positioning, verification to monitoring, and can accurately match applications in semiconductors, aerospace, power systems, liquid cooling and other fields.

Application one 

Precision leak detection: the cornerstone of ensuring product safety and performance

In high-end precision manufacturing fields such as semiconductors, liquid cooling, nuclear power, aerospace, automobiles, and medical care, small leaks in components such as die castings, cavities, valves, and pipelines may affect equipment performance and operational safety. 

HM-400/410 helium mass spectrometer leak detector, independently developed by Hirays, has advanced technology, stable performance, easy installation and maintenance, and can achieve high sensitivity and high repeatability sealing detection and leak location.

? HM-400 Helium Mass Spectrometer Leak Detector

Core advantages

Superior performance: high sensitivity, fast response, supports 7*24 hours long-term online testing, has multiple leak detection modes, wide application range, and adapts to complex working conditions. 

Intelligent and efficient: The optimally designed mass spectrometry system and intelligent algorithms ensure fast response in all ranges. 

Comprehensive solution: Provide one-stop service from solution design, equipment integration to on-site debugging, support non-standard customization, and are easy to use. 

Improve quality and efficiency: It can significantly improve detection accuracy and stability, helping companies reduce quality risks and comprehensive costs.

?Helium inspection plan for die casting machine (vacuum box method)

?Helium inspection system for liquid cooling components

Application 2 

Residual gas analysis: key to process optimization and failure diagnosis

In semiconductor vacuum coating, wafer manufacturing and other processes, residual gas will directly affect the thickness, uniformity and defect rate of the film. 

Through the HM-100 / HM-130 / HM-150 residual gas analyzer completely developed by Hirays, key gas components such as H?O, H?, N?, O?, Ar and their partial pressure changes in the chamber can be monitored in real time, providing data support for process optimization and abnormal diagnosis.

?HM-100 Residual Gas Analyzer

Core advantages

Extremely sensitive: the minimum detectable partial pressure reaches 3*10-14Torr, effectively ensuring the cleanliness of the vacuum system.

Independent and controllable: 100% self-developed core components, performance comparable to imported products, and shorter delivery cycle.

Efficient maintenance: Key consumables such as ion sources and electron multipliers are easy to replace, effectively reducing downtime and maintenance costs. 

Customized development: Software functions can be customized on demand and seamlessly connected to production systems such as MES to help customers improve product yield and consistency.

Conclusion

From precise leak detection to system health management

With the trend of industrial manufacturing upgrading to high-end and precision, pure qualitative leak detection can no longer meet the demand. "Quantitative leak detection"+The dual capabilities of "system diagnosis" provide enterprises with an upgrade path from "passive leak detection" to "active management and control". 

In the future, with the further development of intelligent manufacturing, helium mass spectrometry andRGAThe system will become the standard for seal detection and gas analysis in the high-end manufacturing field, and Hirays will continue to use technological innovation to provide more accurate and efficient detection solutions for various industries.